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FABRICATION OF MILLIMETER WAVE DEVICES ON DIELECTRIC MEMBRANES BY MICROMACHINING TECHNOLOGY

    Work supported by the INCO-COPERNICUS Project 977131 “MEMSWAVE” and by the Consiglio Nazionale delle Ricerche - Provincia Autonoma di Trento (CNR-PAT) agreement.

    https://doi.org/10.1142/9789812776457_0006Cited by:0 (Source: Crossref)
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    Abstract:

    In this paper, the technology for the realization of micromachined millimeter wave devices on dielectric membranes will be described. Examples of filters and antennas obtained on thin trilayers made by SiO2/Si3N4/SiO2 structures will be given, and their microwave response will be shown.