Implant Doping and Isolation

The following sections are included:

• Introduction

• Ion Stopping and Radiation Damage

  • Energy Deposition

  • Damage Introduction and Removal

  • Annealing

• Implant Isolation

  • GaAs

  • AlGaAs

  • InP

  • InGaAs

  • AlInAs

  • InGaP and AlGaP

• Implant Doping

  • GaAs

  • AlGaAs

  • InP

  • InAlAs and InGaAs

  • InGaAsP

  • InGaP, AlInP and AlGaP

• MeV Implantation

• Device Applications

  • MESFETs

  • HEMT Structures

  • HBTs

  • IMPATT Diodes and Optical Waveguides

  • Heterostructure Lasers and SEEDs

• Conclusions

• References