Sub-micrometre spherical particles of TiO₂, ZrO₂ and PZT by nebulized spray pyrolysis of metal–organic precursors

Nebulized spray pyrolysis of metal–organic precursors in methanol solution has been employed to prepare powders of TiO₂, ZrO₂ and PbZr_0.5Ti_0.5O₃(PZT). This process .ensures complete decomposition of the precursors at relatively low temperatures. The particles have been examined by scanning and transmission electron microscopy as well as X-ray diffraction. As prepared, the particles are hollow agglomerates of diameter 0.1–1.6 μm, but after heating to higher temperatures the ultimate size of the particles comprising the agglomerates are considerably smaller (0.1 μm or less in diameter) and crystalline.