Research on Palladium Silver Alloy Resistance Hydrogen Sensor

In this research, palladium silver alloy was chosen as the hydrogen sensitive material. By using RF sputtering, Ta₂O₅ transition layer was coated on the ceramic substrate, and then palladium silver alloy film was prepared by using the DC magnetron sputtering. The performance of palladium silver alloy membranes was characterized by experiment. The results show that hydrogen sensor has good response time and repeat response characteristics in 5% hydrogen concentration at room temperature.