Development of a Micro-PIXE Camera
Abstract
We developed a system of μ-PIXE analysis at the division of Takasaki ion accelerator for advanced radiation application (TIARA) in Japan Atomic Energy Research Institute (JAERI), which consists of a microbeam apparatus, a multi-parameter data acquisition system and a personal computer. Elemental analysis in the region of 500 μm × 500 μm can be performed with a spatial resolution of < 0.3 μm and multi-elemental distributions are presented as images on a computer display even during measurement. We call this system a micro-PIXE camera.