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A NOVEL FABRICATION METHOD OF TWO-DIMENSIONAL NANO-MOLD BY COMBINING ULTRAVIOLET LITHOGRAPHY WITH WET ETCHING TECHNOLOGY

School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, P. R. China

Research Institute for Structure Technology of Advanced Equipment, Hebei University of Technology, Tianjin 300401, P. R. China

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SUZHOU TANG

School of Economics and Management, Tianjin University of Science and Technology, Tianjin 300222, P. R. China

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LINGPENG LIU

Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian, Liaoning 116024, P. R. China

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HELIN ZOU

Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian, Liaoning 116024, P. R. China

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, and

ZHENGYAN ZHANG

School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, P. R. China

E-mail Address: zzy@hebut.edu.cn

Corresponding author.

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https://doi.org/10.1142/S0218625X20500286Cited by:1 (Source: Crossref)

Abstract

Nano-fluidic devices have great potential in the applications of biology, chemistry, and medicine. However, their applications have been hampered by their expensive or complicated fabrication methods. We present a new and simple approach to fabricate low-cost two-dimensional (2D) nano-mold based on ultraviolet (UV) lithography and wet etching. The influence of UV lithography parameters on the width dimension of AZ5214 photoresist was investigated. With the optimized parameters of UV lithography, the width dimension of photoresist patterns had sharply decreased from microscale to nano-scale. At the same time, the influences of etching time on the over-etching amount of SiO₂ film and nano-mold depth were also analyzed for further reducing the width of nano-mold. In addition, the effect of photoresist mesas deformation on the nano-mold fabrication was also studied for improving the quality of nano-mold. By the proposed method, trapezoid cross-sectional 2D nano-mold with different dimensions can be obtained for supporting varied applications. The minimum nano-mold arrays we fabricated are the ones with the dimensions of 115nm in top edge, 284nm in bottom edge, and 136nm in depth. This method provides a low-cost way to fabricate high-quality and high-throughput 2D nano-mold.

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References

1. Q. Xie, Q. Zhou, F. Xie, J. M. Sang, W. Wang, H. A. Zhang, W. G. Wu and Z. H. Li, Biomicrofluidics 6(1) (2012) 016502. Web of Science, Google Scholar
2. R. B. Schoch, J. Y. Han and P. Renaud, Rev. Mod. Phys. 80(3) (2008) 839. Web of Science, ADS, Google Scholar
3. H. Daiguji, Chem. Soc. Rev. 39(3) (2010) 901. Web of Science, Google Scholar
4. L. J. Cheng, Biomicrofluidics 12(2) (2018) 021502. Web of Science, Google Scholar
5. L. Rems, D. Kawale, L. J. Lee and P. E. Boukany, Biomicrofluidics 10(4) (2016) 043403. Web of Science, Google Scholar
6. V. Muller and F. Westerlund, Lab Chip 17(4) (2017) 579. Web of Science, Google Scholar
7. C. Wang, S. W. Nam, J. M. Cotte, C. V. Jahnes, E. G. Colgan, R. L. Bruce, M. Brink, M. F. Lofaro, J. V. Patel, L. M. Gignac, E. A. Joseph, S. P. Rao, G. Stolovitzky, S. Polonsky and Q. H. Lin, Nat. Commun. 8 (2017) 14243. Web of Science, ADS, Google Scholar
8. T. Tsukahara, K. Mawatari and T. Kitamori, Chem. Soc. Rev. 39(3) (2010) 1000. Web of Science, Google Scholar
9. M. Tokeshi and K. Sato, Micromachines 7(9) (2016) 164. Web of Science, Google Scholar
10. J.-Y. Wang, C. Liu, Z. Xu, Y.-K. Li and Y.-L. Liu, Microsyst. Technol. 20(1) (2014) 35. Web of Science, Google Scholar
11. X. Y. Chen, S. A. Zhang, L. Zhang, Z. Yao, X. D. Chen, Y. Zheng and Y. L. Liu, Biomed. Microdevices 19(3) (2017) 19. Web of Science, Google Scholar
12. J. Wang, L.-L. Han and Z. Xu, Microsyst. Technol. 25(2) (2019) 711. Web of Science, Google Scholar
13. L. Zhang, F. X. Gu, L. M. Tong and X. F. Yin, Microfluid. Nanofluid. 5(6) (2008) 727. Web of Science, Google Scholar
14. S. W. Nam, M. H. Lee, S. H. Lee, D. J. Lee, S. M. Rossnagel and K. B. Kim, Nano Lett. 10(9) (2010) 3324. Web of Science, ADS, Google Scholar
15. A. A. Evstrapov, I. S. Mukhin, A. S. Bukatin and I. V. Kukhtevich, Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At. 282 (2012) 145. Web of Science, ADS, Google Scholar
16. Y. F. Chen, Microelectron. Eng. 135 (2015) 57. Web of Science, Google Scholar
17. M. J. Lopez-Bosque, E. Tejeda-Montes, M. Cazorla, J. Linacero, Y. Atienza, K. H. Smith, A. Llado, J. Colombelli, E. Engel and A. Mata, Nanotechnology 24(25) (2013) 255305. Web of Science, ADS, Google Scholar
18. L. D. Menard and J. M. Ramsey, Anal. Chem. 85(2) (2013) 1146. Web of Science, Google Scholar
19. J. van Kan, F. Zhang, S. Chiam, T. Osipowicz, A. Bettiol and F. Watt, Microsyst. Technol. 14 (2008) 1343. Web of Science, Google Scholar
20. J. van Kan, P. Shao, Y. Wang and P. Malar, Microsyst. Technol. 17(9) (2011) 1519. Web of Science, Google Scholar
21. N. R. Tas, J. W. Berenschot, P. Mela, H. V. Jansen, M. Elwenspoek and A. van den Berg, Nano Lett. 2(9) (2002) 1031. Web of Science, ADS, Google Scholar
22. B. Ilic, D. Czaplewski, M. Zalalutdinov, B. Schmidt and H. G. Craighead, J. Vac. Sci. Technol. B 20(6) (2002) 2459. Web of Science, ADS, Google Scholar
23. C. C. Wong, A. Agarwal, N. Balasubramanian and D. L. Kwong, Nanotechnology 18(13) (2007) 135304. Web of Science, ADS, Google Scholar
24. K. D. Park, S. W. Lee, N. Takama, T. Fujii and B. J. Kim, Microelectron. Eng. 86 (2009) 1385. Web of Science, Google Scholar
25. X. Y. Chen and L. Zhang, Sens. Actuators B, Chem. 254 (2018) 648. Web of Science, Google Scholar
26. M. Kim, D. Ha and T. Kim, Nat. Commun. 6 (2015) 6247. Web of Science, ADS, Google Scholar
27. M. Kim and T. Kim, Anal. Chem. 87(22) (2015) 11215. Web of Science, Google Scholar
28. K. Efimenko, M. Rackaitis, E. Manias, A. Vaziri, L. Mahadevan and J. Genzer, Nature Mater. 4(4) (2005) 293. Web of Science, ADS, Google Scholar
29. S. Chung, J. H. Lee, M. W. Moon, J. Han and R. D. Kamm, Adv. Mater. 20(16) (2008) 3011. Web of Science, Google Scholar
30. Y. K. Choi, J. Zhu, J. Grunes, J. Bokor and G. A. Somorjai, J. Phys. Chem. B 107(15) (2003) 3340. Web of Science, Google Scholar
31. J. Hallstedt, P. E. Hellstrom and H. H. Radamson, Thin Solid Films 517(1) (2008) 117. Web of Science, ADS, Google Scholar
32. J. Sakamoto, H. Noma, N. Fujikawa, H. Kawata, M. Yasuda and Y. Hirai, Microelectron. Eng. 98 (2012) 189. Web of Science, Google Scholar
33. R. Chantiwas, S. Park, S. A. Soper, B. C. Kim, S. Takayama, V. Sunkara, H. Hwang and Y.-K. Cho, Chem. Soc. Rev. 40(7) (2011) 3677. Web of Science, Google Scholar