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Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

E-mail Address: hillmer@ina.uni-kassel.de

Corresponding author.

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B. Elsaka

https://orcid.org/0000-0003-1378-8653

E-mail Address: elsaka@ina.uni-kassel.de

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P. Kästner

https://orcid.org/0000-0003-1291-0354

E-mail Address: kaestner@ina.uni-kassel.de

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S. Akhundzada

https://orcid.org/0000-0002-6602-7594

E-mail Address: s.akhundzada@physik.uni-kassel.de

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M. K. Hasan

https://orcid.org/0000-0002-3305-5206

E-mail Address: kamrul.hasan@ina.uni-kassel.de

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J. Fiedler

https://orcid.org/0000-0002-2179-0625

Department of Physics and Technology, University of Bergen, Allegaten 55, 5007 Bergen, Norway

E-mail Address: johannes.fiedler@uib.no

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S. Y. Buhmann

Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), Institute of Physics, University of Kassel, D-34132 Kassel, Germany

E-mail Address: stefan.buhmann@uni-kassel.de

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C. Backes

https://orcid.org/0000-0002-4154-0439

Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), Institute of Chemistry, Kassel University, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

E-mail Address: backes@uni-kassel.de

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, and

J. Adam

https://orcid.org/0000-0001-7177-3252

Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), Department of Electrical Engineering and Computer Science, Computational Materials and Photonics (CMP), University of Kassel, Germany

E-mail Address: jost.adam@uni-kassel.de

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https://doi.org/10.1142/S0217751X2543016XCited by:0 (Source: Crossref)

Abstract

A methodology of 3D self-assembly is presented, pairing neighboring electromechanical system (MEMS) elements to create Yin or Yang-shaped structures. After sacrificial layer removal and during the sequential drying process, (i) surface tension forces bring the neighboring MEMS shutter blades very close to each other, and (ii) Casimir forces and van der Waals forces keep the blades attached tightly. Various experimental trials to reopen the tight attachments are reported. The relative significance of fundamental forces during 1D and 3D scaling of the system is presented.

Keywords:

PACS: 81.16.Dn, 85.85.+j, 12.20.Fv, 68.60.Bs

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References

1. H. Hillmer, J. Schmid and I. Stadler, Micromirror Arrays, European Patent 1700152 B1, U.S. Patent 7677742 B2 (2003). Google Scholar
2. H. Hillmer, M. S. Q. Iskhandar, M. K. Hasan, S. Akhundzada, B. AlQargholi and A. Tatzel , J. Opt. Microsyst. 1, 014502 (2021). Crossref, Web of Science, Google Scholar
3. S. Baby, M. S. Q. Iskhandar, M. K. Hasan, S. Liebermann, J. Chen, H. Qasim, S. Liu, E. Farrag, D. Löber, N. Ahmed et al., Micromachines. 16, 103 (2025). Crossref, Web of Science, Google Scholar
4. M. K. Hasan, S. Liebermann, M. S. Q. Iskhandar, D. Löber, Q. Li, G. Xu and H. Hillmer , Yearbook Surface Technology, Vol. 78 ( Leuze Publishing House, 2022), pp. 217–237. Google Scholar
5. M. S. Q. Iskhandar, B. Al-Qargholi, M. M. Khan, A. Tatzel, H. Luo, S. Nazemroaya, Q. Li and H. Hillmer , Yearbook Surface Technology, Vol. 75 ( Leuze Publishing House, 2019), pp. 93–107. Google Scholar
6. B. Lamontagne, N. R. Fong, I. H. Song, P. Ma, P. Barrios and D. Poitras , J. Micro/Nanolithogr. MEMS, MOEMS 18, 040901 (2019). Crossref, Web of Science, Google Scholar
7. K. Mori, K. Misawa, S. Ihida, T. Takahashi, H. Fujita and H. A. Toshiyoshi , IEEE Photonics Technol. Lett. 28, 593 (2016). Crossref, Web of Science, ADS, Google Scholar
8. P. Roux, E. Woirgard, M. Pizzi, O. De Martiis and V. Koniachkine , Sens. Actuators A Phys. 119, 1 (2005). Crossref, Web of Science, ADS, Google Scholar
9. P. Schalberger, S. A. Al Nusayer and C. Raichle, SID Symp. Dig. Tech. Papers 47, (2016). Google Scholar
10. C. H. Kim, K. D. Jung and W. A. Kim , A wafer-level micro mechanical global shutter for a micro camera, in Proc. IEEE 22nd Int. Conf. Micro Electro Mechanical Systems ( IEEE, 2009), pp. 156–159. Crossref, Google Scholar
11. P. Kästner, B. Elsaka, M. S. Q. Iskhandar, S. Liebermann, R. Donatiello, S. Liu and H. Hillmer, Micromachines 16, 168 (2025). Crossref, Google Scholar
12. S. Akhundzada, X. Yang, J. Fiedler, E. Käkel, B. Al-Qargholi, S. Buhmann, A. Ehresmann and H. Hillmer , Microsyst. Technol. 28, 2139 (2022). Crossref, Web of Science, Google Scholar
13. B. Elsaka, P. Kästner, E. Käkel, R. Donatiello and H. Hillmer , Appl. Sci. 13, 1538 (2023). Crossref, Google Scholar
14. P. Kästner, E. Käkel, S. Akhundzada, R. Donatiello and H. Hillmer , Development of self-assembled 3D MEMS Paired Shutter Arrays for studies on Casimir forces, in Proc. 27th Microoptics Conf., 25–28 September 2022, Jena, Germany, pp. 74–75. Google Scholar
15. S. Y. Buhmann , Dispersion Forces II: Many-Body Effects, Excited Atoms, Finite Temperature and Quantum Friction ( Springer, New York, 2013), p. 248. Google Scholar
16. B. Elsaka, X. Yang, P. Kästner, K. Dingel, B. Sick, P. Lehmann, S. Y. Buhmann and H. Hillmer , Materials 17, 3393 (2024). Crossref, Web of Science, Google Scholar
17. B. Elsaka, P. Kästner, Y. Hamarneh, E. Käkel, R. Donatiello and H. Hillmer , Technical Digest OMN, 2024, San Sebastián, Spain, pp. 136–137. Google Scholar
18. S. K. Lamoreaux , Rep. Prog. Phys. 68, 201 (2005). Crossref, Web of Science, ADS, Google Scholar
19. K. A. Milton , J. Phys. A: Math. Gen. 37, R209 (2004). Crossref, Web of Science, ADS, Google Scholar
20. J. Błocki, J. Randrup, W. J. Świa̧tecki and C. F. Tsang , Ann. Phys. 105, 427 (1977). Crossref, Web of Science, ADS, Google Scholar
21. K. A. Milton , State of the Quantum Vacuum, The: Casimir Physics in the 2020’s ( World Scientific, 2022). Link, Google Scholar
22. K. A. Milton , J. Phys. Conf. Ser. 161, 012001 (2009). Crossref, ADS, Google Scholar
23. K. A. Milton, J. S. Høye and I. Brevik , Symmetry, 8, 29 (2016). Crossref, Web of Science, ADS, Google Scholar
24. G. L. Klimchitskaya, U. Mohideen and V. M. Mostepanenko , Rev. Modern Phys. 81, 1827 (2009). Crossref, ADS, Google Scholar
25. M. Bordag, U. Mohideen and V. M. Mostepanenko , Phys. Rep. 353, 1 (2001). Crossref, Web of Science, ADS, Google Scholar
26. https://tinyurl.com/3v78ycuz. Google Scholar
27. C. Multiphysics , Introduction to COMSOL Multiphysics Extregistered ( COMSOL Multiphysics, Burlington, MA, 1998). Google Scholar
28. H. B. G. Casimir , Proc. Kon. Ned. Akad. Wet. 51, 793 (1948). Google Scholar
29. F. A. Burger, R. W. Corkery, S. Y. Buhmann and J. Fiedler , J. Phys. Chem. C 124, 24179 (2020). Crossref, Web of Science, Google Scholar
30. S. Adachi , The Handbook on Optical Constants of Metals ( World Scientific, Singapore, 2012). Link, Google Scholar
31. P. Tolias , Surf. Sci. 700, 121652 (2020). Crossref, Web of Science, Google Scholar
32. J. Fiedler, K. Berland, F. Spallek, I. Brevik, C. Persson, S. Y. Buhmann and M. Boström , Phys. Rev B, 101, 235424 (2020). Crossref, Web of Science, ADS, Google Scholar
33. T. Ueltzhöffer, R. Streubel, I. Koch, D. Holzinger, D. Makarov, O. G. Schmidt and A. Ehresmann , ACS Nano, 10, 8491 (2016). Crossref, Web of Science, Google Scholar
34. H. Hillmer, J. Daleiden, C. Prott, F. Römer, S. Irmer, V. Rangelov, A. Tarraf and S. Schüler. Appl. Phys. B 75, 3 (2002). Crossref, Web of Science, ADS, Google Scholar