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Research PapersNo Access

INVESTIGATION OF BIAXIAL ELASTIC MODULUS AND CTE OF BaTiO₃ FILMS

Department of Applied Physics, Hunan University, Changsha 410082, China

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Department of Applied Physics, Hunan University, Changsha 410082, China

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Department of Applied Physics, Hunan University, Changsha 410082, China

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Department of Applied Physics, Hunan University, Changsha 410082, China

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Department of Applied Physics, Hunan University, Changsha 410082, China

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Changsha Environmental Protection College, Changsha 410004, China

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https://doi.org/10.1142/S021797920903876XCited by:0 (Source: Crossref)

Abstract

To develop high-quality film device with good reliability, it is often essential to be able to evaluate the parameters such as stress, the biaxial elastic modulus, and coefficient of thermal expansion (CTE) of film. Based on the stress measurement in situ during the thermal cycle by laser scanning method, two techniques were used to measure the biaxial elastic modulus and CTE of BaTiO₃ films deposited on substrate. The value of the biaxial elastic modulus and CTE for BaTiO₃ films determined from two methods is close, in which the biaxial elastic modulus of BaTiO₃ films is higher than that of corresponding bulk while the CTE of BaTiO₃ films is a little smaller than that of bulk material.

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Vol. 23, No. 24

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Received 1 September 2006

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