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COMPLEX AFM ANALYSIS WITH RASTER SPRING IMAGING MODE

IVAN BYKOV

NT-MDT Co. Building 100, Zelenograd, Moscow, Russia

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and

ERMOLENKO ANDREW

Taganrog State Radio Technical University, Taganrog, Russia

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https://doi.org/10.1142/S021797921006437XCited by:0 (Source: Crossref)

Abstract

The new Raster Spring Imaging Mode is developed to study soft and bad – fixed objects in AFM. The normal and lateral force between tip and sample is minimized. We discuss the principle of operation, main features and its prospect for specific applications. Experimental results revealed advantages with regard to other techniques like contact or semicontact mode. The silicon structure measurements with Raster Spring Imaging Mode allow to obtain information of elastic and adhesion properties without losing sight of good topography image.

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