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Thermal annealing induced multiple phase in V/V₂O₅ alternating multilayer structure

King Saud University, Department of Physics and Astronomy, College of Science, Riyadh, Saudi Arabia

Université de Monastir, Laboratoire de Micro-optoélectronique et Nanostructures, Faculté des Sciences Avenue de l’environnement, 5019, Monastir, Tunisia

E-mail Address: bilahi@ksu.edu.sa

Corresponding author.

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M. Abdel-Rahman

Department of Electrical Engineering, College of Engineering, King Saud University, Riyadh, Saudi Arabia

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Z. Zaaboub

Université de Monastir, Laboratoire de Micro-optoélectronique et Nanostructures, Faculté des Sciences Avenue de l’environnement, 5019, Monastir, Tunisia

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M. F. Zia

Prince Sultan Advanced Technologies Research Institute (PSATRI), King Saud University, Riyadh, Saudi Arabia

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M. Alduraibi

King Saud University, Department of Physics and Astronomy, College of Science, Riyadh, Saudi Arabia

National Center for Applied Physics, King Abdulaziz City for Science and Technology (KACST), Riyadh, Saudi Arabia

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, and

H. Maaref

Université de Monastir, Laboratoire de Micro-optoélectronique et Nanostructures, Faculté des Sciences Avenue de l’environnement, 5019, Monastir, Tunisia

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https://doi.org/10.1142/S0217979216502106Cited by:15 (Source: Crossref)

Abstract

In this paper, we report on microstructural, optical and electrical properties of alternating multilayer of vanadium pentoxide (V₂O₅), 25 nm, and vanadium (V), 5 nm, thin films deposited at room temperature by radio frequency (RF) and DC magnetron sputtering, respectively. Raman and photoluminescence (PL) spectroscopy have been employed to investigate the effects of thermal annealing for 20, 30 and 40 min at 400 $^{\circ}$ C in Nitrogen (N₂) atmosphere on the multiple phase formation and its impact on the film resistance and temperature coefficient of resistance (TCR). We demonstrate that the oxygen free annealing environment allows the formation of multiple phases including V₂O₅, V₆O $_{13}$ and VO₂ through oxygen diffusion and consequent deficiency in V₂O₅ layer.

Keywords:

PACS: 68.55.Nq, 63.50.Gh, 81.10.Jt, 81.40.-z, 73.40.-c

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