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Fabrication of absorption gratings with X-ray lithography for X-ray phase contrast imaging

Bo Wang

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China

E-mail Address: wangbo@ihep.ac.cn

Corresponding author.

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Yu-Ting Wang

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China

University of Chinese Academy of Sciences, Beijing 100049, P. R. China

E-mail Address: wangyt@ihep.ac.cn

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Fu-Ting Yi

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China

E-mail Address: yift@ihep.ac.cn

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Tian-Chong Zhang

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China

E-mail Address: zhangtc@ihep.ac.cn

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Jing Liu

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China

E-mail Address: liujing1987@ihep.ac.cn

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, and

Yue Zhou

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China

University of Chinese Academy of Sciences, Beijing 100049, P. R. China

E-mail Address: zhouyue@ihep.ac.cn

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https://doi.org/10.1142/S0217979218501631Cited by:2 (Source: Crossref)

Abstract

Grating-based X-ray phase contrast imaging is promising especially in the medical area. Two or three gratings are involved in grating-based X-ray phase contrast imaging in which the absorption grating of high-aspect-ratio is the most important device and the fabrication process is a great challenge. The material with large atomic number Z is used to fabricate the absorption grating for excellent absorption of X-ray, and Au is usually used. The fabrication process, which involves X-ray lithography, development and gold electroplating, is described in this paper. The absorption gratings with 4 $μ$ $μ$ m period and about 100 $μ$ $μ$ m height are fabricated and the high-aspect-ratio is 50.

Keywords:

PACS: 85.40.Hp, 07.85.Qe, 87.49.-e

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