We have investigated the influences of the heating rate and film thickness on the growth of GdBa₂Cu₃O_y (GBCO) thin films prepared by the BaF₂ex-situ process without water vapor. Critical current density (J_c) and surface morphology of the GBCO films were improved by increasing the heating rate during growth from 30 to 50°C/min. The GBCO films prepared by the heating rate of 50°C/min had the maximum J_c of 2.1 MA/cm². The J_c value of the GBCO films was about 2 MA/cm² up to 200 nm, and decreased to 0.92 MA/cm² at 400 nm.

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