THE EFFECT OF ETCHING TIME ON RECTIFYING CHARACTERISTIC IN SnO2/p-Si AND SnO2/p-PoSi HETEROJUNCTION SCHOTTKY DIODES
Abstract
We have fabricated SnO2/p-Si and SnO2/p-PoSi heterojunction diodes by spray pyrolysis method. To prepare porous Si substrates, the etching time was varied from 10 to 20 and 30 mins. In these samples, the SEM micrographs showed a distributed pore areas surrounded by columnar walls with various height. The data analysis of the rectified I–V characteristic, using thermionic emission Schottky diode theory, showed that although the barrier height is about 0.5–0.6 eV in all samples other two important diode parameters, i.e. the ideality factor n and the series resistance rs, are strongly etching time-dependant and are increased with increasing the etching time.