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EFFECT OF SUBSTRATE TEMPERATURE ON THE GROWTH AND PROPERTIES OF ZnO:Al THIN FILMS

College of Civil Engineering, Hunan University, Changsha, Hunan 410082, China

College of Civil Engineering and Architecture, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China

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YINSHENG ZOU

College of Civil Engineering, Hunan University, Changsha, Hunan 410082, China

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https://doi.org/10.1142/S0218625X1250014XCited by:2 (Source: Crossref)

Abstract

ZnO:Al (AZO) transparent conductive films used for solar cells were prepared by DC magnetron sputtering technology. The influence of substrate temperature on the electrical and optical properties of the films was studied. Further, the AZO films prepared were etched in diluted hydrochloric acid. The film surface morphology after etching for different time was researched.

Keywords:

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