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EFFECTS OF HEAT TREATMENTS ON ALUMINUM OXIDE COATINGS DEPOSITED ON Ni-BASED ALLOY

State Key Laboratory of Solidification Processing, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi'an 710072, P. R. China

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FA LUO

State Key Laboratory of Solidification Processing, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi'an 710072, P. R. China

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CHUNHAN HSEIH

Department of Electrical Engineering and Computer Science, Northwestern University Evanston, Illinois 60208, United States

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, and

XIANGYU LI

Department of Electrical Engineering and Computer Science, Northwestern University Evanston, Illinois 60208, United States

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https://doi.org/10.1142/S0218625X1550016XCited by:1 (Source: Crossref)

Abstract

Al_xO_y films coated on both Ni-based superalloy and silica substrates were prepared by DC reactive magnetron sputtering. Post-deposition annealing was carried out on those as-deposited films. And then 1 h heat treatments were done on the annealed films at constant temperatures ranging from 600–900°C to simulate the high-temperature application. The Al_xO_y film heated at 600°C exhibited good film property. Bonding strength between the 600°C-heated Al_xO_y film and the Ni-based substrate was about 11.6 MPa.

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