HIGH DENSITY DIAMOND WHISKER FABRICATION AND SUPPRESSION OF SECONDARY ELECTRON EMISSION BY WHISKERS
Abstract
Diamond whiskers were formed by etching diamond thin films using metal clusters as a shadow mask, which were deposited on the diamond film before or during etching. The whiskers were as thin as 100 nm and the density was as high as 1010/cm2. The secondary electron emission yield of the diamond whiskers was significantly reduced as compared to the initial diamond film. The decrease in the yield was more significant if the primary electrons were impinged in parallel direction with the whiskers. We suggest that absorption of the secondary electrons in the narrow gap between the whiskers was the reason for the decreased yield.