Selected Invited Papers from the Bilateral Conference between Canadian and French Researchers in Nanofabrication and Nanoscience; Edited by Andreas RuedigerNo Access
MICRO-FABRICATION PROCESS FOR AN INTEGRATED BIOSENSOR COMPOSED OF A SPR TRANSDUCER COUPLED TO A MICROCALORIMETRIC SENSOR
https://doi.org/10.1142/S0219581X12400108Cited by:1 (Source: Crossref)
Abstract
Integrated biosensors with several types of transducers are complex to manufacture. This paper presents the fabrication process for a bimodal biosensor by using silicon microfabrication process. The device is composed of a surface plasmons resonance (SPR) transducer and a microcalorimetric device. The fabrication process has a yield in our academic foundry. The device was functionalized with a simple BSA-biotin adsorption. SPR sensing performance was assessed by neutravidin binding to immobilized biotins.
