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A PLATE MODEL FOR THE EVALUATION OF PULL-IN INSTABILITY OCCURRENCE IN ELECTROSTATIC MICROPUMP DIAPHRAGMS

EMANUELE BERTARELLI

Department of Structural Engineering, Politecnico di Milano, Piazza Leonardo da Vinci, 32, 20133 Milano, Italy

Corresponding author.

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RAFFAELE ARDITO

Department of Structural Engineering, Politecnico di Milano, Piazza Leonardo da Vinci, 32, 20133 Milano, Italy

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RAFFAELE ARDITO

Department of Structural Engineering, Politecnico di Milano, Piazza Leonardo da Vinci, 32, 20133 Milano, Italy

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ALBERTO CORIGLIANO

Department of Structural Engineering, Politecnico di Milano, Piazza Leonardo da Vinci, 32, 20133 Milano, Italy

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, and

ROBERTO CONTRO

Department of Structural Engineering, Politecnico di Milano, Piazza Leonardo da Vinci, 32, 20133 Milano, Italy

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https://doi.org/10.1142/S1758825111000841Cited by:20 (Source: Crossref)

Abstract

This work deals with the mechanical response of circular microplates undergoing electrostatic actuation. A one degree-of-freedom model and Finite Element approaches are exploited in a nondimensional framework. First, a quasi-static conventional approach is adopted. From the one degree-of-freedom model a closed form solution for the plate electromechanical problem is obtained for the first time.

Then a strong attention is paid to pull-in phenomena in nonlinear dynamics. Dynamic behavior of the structure is explored, leading to the identification of a pull-in loading condition which is dependent on the quality factor Q. The outcomes are discussed and widely compared with those available in the literature for similar microsystems.

Keywords:

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