PIEZOELECTRIC MATERIALS FOR IMPEDANCE DRIVEN MICRO-CHANNEL FLOW
Abstract
This paper presents study of a novel impedance pumping induced by high frequency actuation. PZT (Lead Zirconate Titanate) cantilever beam was being integrated as a form of high frequency actuator to induce flow. The drive test microchannel has the dimension 15 × 3 × 0.4 mm3, and a significant flow rate of 36 μL/s has being measured. Furthermore, flow behavior as functions of actuation amplitude and frequency are presented. It is found that flows were in positive correlations with compression and frequency. The present novel PZT driven micro impedance pump may offer an alternate solution in microfludic systems.