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Novel method for carbon nanotube growth using vapor-phase catalyst delivery

Takayuki Nakano

http://orcid.org/0000-0001-7203-8436

Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan

Department of Electronics and Materials Science, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan

E-mail Address: nakano.takayuki@shizuoka.ac.jp

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Takahiro Kikuchi

Department of Electronics and Materials Science, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan

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Yuki Usuda

Department of Electronics and Materials Science, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan

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, and

Yoku Inoue

Department of Electronics and Materials Science, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan

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https://doi.org/10.1142/S1793604720500265Cited by:0 (Source: Crossref)

Abstract

In this study, we demonstrated a novel method to grow carbon nanotubes (CNTs) by chloride-mediated chemical vapor deposition with hydride vapor-phase nucleated catalyst (HVPN). In the HVPN method, FeCl₂ as a catalyst precursor was produced by an in situ chemical reaction between Fe powder and HCl gas. After the synthesis of FeCl₂, CNTs were grown by supplying acetylene. We studied growth conditions for the catalyst formation process in HVPN method. High-quality CNT forests were grown by optimizing the FeCl₂ synthesis conditions. This study has established the HVPN method as a novel, highly controllable way to grow CNT forests.

Keywords:

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