REVIEW OF ISSUES PERTAINING TO THE DEVELOPMENT OF CONTACTS TO SILICON CARBIDE: 1996–2002

The following sections are included:

• Introduction

• Thermal Stability

  • Thermal Stability of Ohmic Contacts

  • Thermal stability of Rectifying contacts

• Ohmic Contacts to p-type SiC

  • Introduction

  • Al-based Contacts

  • Al-Free Contacts

• Ohmic Contacts using Nickel

  • Introduction

  • Thermodynamics

  • Phase Formation Sequence

  • Issues

  • Mechanisms

  • Alloying

• Effects of Defects on Schottky Contacts

• Summary

• Acknowledgments

• References