SELECTIVE GROWTH OF CARBON NANOTUBE ARRAYS SYNTHESIZED BY INJECTION CVD METHOD

Multi-wall carbon nanotube (CNT) arrays synthesis by the atmospheric pressure CVD method has been investigated. Thermal decomposition of fluid hydrocarbons (o- and p-xylole C₈H₁₀) which as a solution with the volatile catalyst (ferrocene Fe(C₅H₅)₂) was introduced into the synthesis zone by injection was employed. Different metal/dielectric/semiconductor (MDS) structures, in particular Ti/SiO₂/Si, Al₂O₃ membrane/Ni catalyst were used. CNTs growth selectivity can be regulated under certain conditions. The vertically aligned close-packed CNT arrays have been obtained as well as single CNTs in the pores of Al₂O₃ matrix with Ni catalyst.