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SUPERJUNCTION STRUCTURES
https://doi.org/10.1142/9789812791016_0006Cited by:0 (Source: Crossref)
Abstract:
The following sections are included:
Introduction
The Unipolar Ideal Silicon Limit
The Superjunction Structure
SJ Electric Field Profiles
Charge Imbalance
Fabrication Technologies
Practical SJ Performance
The Practical Concentration Equation
Practical SJ Performance Equation
Polysilicon Flanked VDMOS (PF VDMOS)
Oxide Bypassed (OB) SJ MOSFET
Graded Doping in Drift Region
Tunable Oxide Bypassed MOSFETs
Gradient Oxide Bypassed (GOB) Structure
Lateral Superjunction Power MOSFET
Device Process Technology
References
