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Hydrogen in Crystalline Semiconductors: III-V Compounds
https://doi.org/10.1142/9789812831675_0007Cited by:0 (Source: Crossref)
Abstract:
The following sections are included:
Introduction
Shallow Dopant Passivation
GaAs and AlGaAs
InP and InGaAs
GaSb
AlGaAsSb
InGaP and AlInAs
GaP
GaAs-on-Si, GaAs-on-InP
Passivation of Deep Levels
Diffusion of Hydrogen in III-V Semiconductors
Hydrogen Introduced During Growth and Processing
Epitaxial and Bulk Growth
Annealing in Molecular Hydrogen
Dry Etching and Deposition
Conclusions
References
