World Scientific
Skip main navigation

Cookies Notification

We use cookies on this site to enhance your user experience. By continuing to browse the site, you consent to the use of our cookies. Learn More
×

System Upgrade on Tue, May 28th, 2024 at 2am (EDT)

Existing users will be able to log into the site and access content. However, E-commerce and registration of new users may not be available for up to 12 hours.
For online purchase, please visit us again. Contact us at customercare@wspc.com for any enquiries.

Finite element modeling and simulation of ultrasensitive film bulk acoustic resonator enabled by micropillar structure

    https://doi.org/10.1142/S0217984921400078Cited by:0 (Source: Crossref)

    Portable and ultra-sensitive film bulk acoustic resonator (FBAR) is a promising device to satisfy the requirement of detecting gas and biological molecule. In this work, a novel sensing device was developed to achieve ultrahigh sensitivity, by coupling polymer micropillars with a FBAR substrate to form a two-degrees-of-freedom resonance system (FBAR-micropillars). We systematically investigated the effects of micropillar structure on the characteristics of FBAR-micropillars device by finite element method (FEM). It was found that the resonant frequency shift increased with increasing the height of micropillars (h) within a certain range, and the FBAR-micropillars device displayed nonlinear frequency response, which was opposite to the linear response of conventional FBAR devices. In addition, a positive resonant frequency shift was captured near the “coupled resonant point” of the FBAR-micropillars device. The geometric parameters of micropillars, including micropillar diameter and micropillar spacing could also cause a change of Q-factor and mass sensitivity. The optimized design of the proposed device achieved a threefold improvement in sensitivity relative to conventional FBAR without pillars, suggesting a feasible method to improve the mass sensitivity of acoustic resonators.

    Remember to check out the Most Cited Articles!

    Boost your collection with these New Books in Condensed Matter Physics today!