Chapter 6: ADVANCED 3D MANUFACTURING: MICRO & NANOSCALE PATTERNING

Patterning and printing 2D and 3D structures on different materials, which also include photosensitive materials, found tremendous interest among the scientific and industrial communities. Laser interference based concepts and methodology can make a significant impact in this area. In this context, the main aim of this chapter is to give the fundamental aspects of patterning at the micro and nanoscale dimensions using the laser interference principle. It is to be emphasised here that these patterning concepts can be employed to print 2D and 3D structures on different materials. The chapter begins with an introduction and covers the fundamentals of laser interference. It then details patterning based on 2-beam and 4-beam interference with the help of a multiple beam interference lithography system. The effects of intensity and polarisation of the interfering beam on the structures are also detailed in this chapter. And finally, it finishes by covering ultrafast laser machining.