Chapter 4. Optoelectronics and Advanced Lasers, Detectors and ImagersNo Access

OPTICAL MEMS TECHNOLOGIES FOR ELECTRICALLY TUNABLE MULTI-SPECTRAL SHORT-WAVE INFRARED SENSORS AND ARRAYS

JASON S. MILNE

Microelectronics Research Group, The University of Western Australia, Perth, Western Australia

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JOHN M. DELL

Microelectronics Research Group, The University of Western Australia, Perth, Western Australia

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ADRIAN J. KEATING

Microelectronics Research Group, The University of Western Australia, Perth, Western Australia

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, and

LORENZO FARAONE

Microelectronics Research Group, The University of Western Australia, Perth, Western Australia

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https://doi.org/10.1142/S0129156408005989Cited by:1 (Source: Crossref)

Abstract

Optical MEMS technology combined with broadband infrared sensor technology is used to realize wavelength-tunable infrared sensors. This paper describes the ongoing research into one such sensor design based on an electrically tunable Fabry-Pérot cavity. Theory, measured results and future research directions are presented and discussed for the single-sensor design currently being developed, in the context of the intended application of this technology; the development of lightweight, portable and robust multi-spectral imaging systems.

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