Development of a high-current microbeam system
Abstract
We report on the development of a high-current microbeam system for wavelength-dispersive X-ray micro particle-induced X-ray emission (WDX--PIXE) for chemical state mapping. The microbeam system is composed of two slits and a quadrupole doublet lens mounted on a heavy rigid support. The microbeam system is installed immediately after a switching magnet. A beam brightness of is obtained at a half-divergence of 0.1 mrad. A beam current of more than 300 pA is obtained for object sizes of with a half-divergence of 0.2 mrad, which corresponds to a beam spot size of . The calculated spot size of the beam was and the measured spot size was . The WDX--PIXE system with the microbeam system is now operational.