GMR/CMR/TMR and Ferroelectric MaterialsNo Access
CRYSTALLINE SrTiO3 THIN FILMS ON SILICON BY PULSED LASER DEPOSITION
https://doi.org/10.1142/S0217979205028980Cited by:0 (Source: Crossref)
Abstract
We have developed a process to grow SrTiO3 (STO) thin films showing single (110) orientation directly on Si by means of pulsed laser deposition technique. The growth of STO films directly on Si has been described. The crystallinity of the grown STO films was characterized by X-ray diffraction analysis of θ-2θ scan and rocking curve. Our results may be of interest for better understanding of the growth based on the perovskite oxide thin films on silicon materials.
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