RELATIONSHIP BETWEEN MICRO-STRUCTURE AND LASER DAMAGE THRESHOLD OF NANO-ZrO₂ FILMS

In this paper, the micro-structure and laser damage threshold of nano-ZrO₂ thin films were investigated. High-purity nano-ZrO₂ particles as the coating materials of samples were prepared by the electron beams evaporation. The micro-structure and crystallitic size of samples were analyzed by X-ray diffraction, a laser by 1064nm, 10ns, 3Hz Nd:YAG laser damage test each for nano-ZrO₂ films. The results showed that oxygen partial pressure has an important influence on the micro-structure of nano-ZrO₂ films, also found that the crystallitic size and different micro-structure influenced the laser damage threshold. The obtained results showed that laser damage threshold of polycrystalline structure is obviously higher than that of amorphous structure.