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Ultra clean manufacturing techniques for final optics assembly in high-power laser facility

Xiaodong Yuan

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

E-mail Address: xdyuan@caep.cn

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Caizhen Yao

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

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Xinxiang Miao

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

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Haibing Lv

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

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Guorui Zhou

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

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Longfei Niu

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

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Hao Liu

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

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Feihu Zhang

Harbin Institute of Technology, Harbin 150001, P. R. China

E-mail Address: zhangfh@hit.edu.cn

Corresponding authors.

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Qingshun Bai

Harbin Institute of Technology, Harbin 150001, P. R. China

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Jiaxuan Chen

Harbin Institute of Technology, Harbin 150001, P. R. China

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Yongzhi Cao

Harbin Institute of Technology, Harbin 150001, P. R. China

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, and

Yongbo Guo

Harbin Institute of Technology, Harbin 150001, P. R. China

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https://doi.org/10.1142/S0217979220400172Cited by:5 (Source: Crossref)

This article is part of the issue:

SPECIAL ISSUE — MMPD 2019

Abstract

Cleanliness control is one of the most important processes for final optics assembly (FOA) in high-power laser systems. In this paper, an “Ultra Clean Manufacturing (UCM)” concept is put forward for the first time to satisfy the cleanliness requirements for FOA. First, the challenges and requirements for cleanliness in FOA are introduced and the concept of UCM is proposed. Significant surface cleaning technologies for mechanical parts and optics are then expounded. Finally, surface cleanliness control techniques, such as “gas knife” and “laser cleaning”, are developed as online cleaning methods for the surface cleanliness in FOA.

Keywords:

PACS: 42.79.-e, 42.87.-d, 68.35.-p

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