INVESTIGATION OF Pt:MgO COMPOSITE FILMS PREPARED BY MAGNETRON SPUTTERING AND PULSED LASER CO-DEPOSITION METHOD
Abstract
Pt:MgO composite films are prepared on quartz substrates at room temperature by magnetron sputtering and pulsed laser co-deposition (MSPLC) method, in which the volume ratio of the composite film can be easily controlled by MSPLC method. The sample with Pt volume percents of 40%, 50%, 60% and 70% are prepared, and all the samples are further annealed at 800∘C for 30min. Impacts of Pt content on the structural and physical properties have been investigated. Pt (111), (002) and (220) peaks can be observed, and the peak intensity increases with the increase of Pt content, as can be seen from the X-ray diffraction (XRD) pattern. Scanning electron microscope (SEM) results show that the size and density of grains increase and the distance between grains is decreased with the volume fraction increase. Significant absorption peaks were observed for different volume percentage of Pt:MgO composite film. Absorption peaks can be observed at 200, 220, 250 and 275nm, corresponding to Pt volume percents of 40%, 50%, 60% and 70%, respectively. The observed red shift of the absorption peak can be mainly related to the increase of Pt grain sizes.
