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Hydrophobic antireflective coating with high laser damage threshold by physical vapor deposition

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 10049, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

E-mail Address: wjg@siom.ac.cn

Corresponding author.

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Cao Feng

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 10049, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Weili Zhang

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 10049, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Ziyuan Xu

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Xiaofeng Liu

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 10049, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Kui Yi

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 10049, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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, and

Jianda Shao

Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 10049, China

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China

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https://doi.org/10.1142/S0217984921502092Cited by:3 (Source: Crossref)

Abstract

Hydrophobic antireflective coating is fabricated by physical vapor deposition. The optical, contact angle and laser damage resistance properties are investigated, respectively. The transmittance of the antireflective coating with hydrophobic layer is 99.58% at 1064 nm with normal incidence. The contact angle with water is 115.6 $^{\circ}$ . The laser damage threshold of the zero probability is 22 J/cm² at 1064 nm with the 12 ns pulse width. This new hydrophobic antireflective coating can be applied in the areas of astronomical optics, laser medical equipment and solar energy, etc.

Keywords:

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