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The h-BN and graphene films on Si substrates were prepared by RF magnetron sputtering and CVD techniques, respectively. Structures and morphologies of these films were analyzed by IR and Raman spectroscopies and scanning electronic microscopy. Thermal conductivities of bulk Si and Si substrate with h-BN or graphene grown were measured and compared. Results indicate that both h-BN and graphene films have an enhancement effect on the TC of the Si substrate even if they are not single-layer. Our findings imply that the h-BN and graphene films may have good applications as a thermal management material to help heat dissipation in semiconductor devices.

SiC/Zr-Si-C coatings were fabricated on the surface of C/SiC composites by molten salt method and CVD method, and then mechanical and structural evolution of SiC/Zr-Si-C coated C/SiC Composites under thermal shock tests were studied. The results showed the degradation of the flexural strength properties and no mass variation. The composition of SiC/Zr-Si-C coatings was characterized by SEM and XPS. The results showed that the main constitute of the coatings was not changed after thermal shock tests. The structural of coating was changed owe to the tensile stress. Due to the debonding of the coating-matrix interfaces, the flexural strength decreased after thermal shock tests.