Design of reproducible, simple and efficient nanofabrication routes has become a frontier topic in the emerging field of nanotechnologies. In this chapter we discuss the "state of the art" of ceramics micro- and nanofabrication techniques. We pay special attention to progress in this field made during the last five years.
In this chapter we will discuss about the progress on the use of lithographic tools to create nanoscale ceramic patterns or the potential of soft lithography to create ceramic structures by means of liquid ceramic precursors. The chapter also describes advances on the use of self-assembly and self organization to achieve nanostructured ceramic surfaces. In the final part, we discuss about the possibility of combining physical vapour deposition with micromolding techniques to obtain nanostructured ceramic subtrates.