This review presents an overview of the fabrication and performance of diamond-like carbon (DLC) films doped with various elements on different substrates. By incorporating metal and nonmetal elements, the mechanical and tribological properties of DLC films, as well as the density and thermal stability of the coating, are enhanced. The amorphous carbon film exhibits a metastable state characterized by a combination of sp2 and sp3 hybridization, which endows it with excellent properties resembling both diamond and graphite. These properties include high hardness, chemical stability, biocompatibility, infrared transmittance, ultra-low friction, and exceptional wear resistance. The application prospects of DLC films in the fields of machinery, biomedicine, microelectronics and optics were analyzed from the aspects of preparation method, doping element, transition layer, surface additive, and friction environment. Furthermore, this paper provides insights into the structure, factors influencing performance, application domains, existing technical challenges, and future development directions of diamond-like films. To study the tribological behavior of DLC films doped with different elements is a necessary condition to ensure its application in various fields. This is important because it ensures that DLC films can be used correctly and safely to the maximum extent possible. In summary, the properties of DLC films doped with different elements on different substrates are summarized in this paper, and some references are provided for their applications in machinery, aerospace, marine, and biomedicine.