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This paper focuses on the problems encountered in the production process of electronic-grade polycrystalline silicon. It points out that the characterization of electronic-grade polycrystalline silicon is mainly concentrated at the macroscopic scale, with relatively less research at the mesoscopic and microscopic scales. Therefore, we utilize the method of physical polishing to obtain polysilicon characterization samples and then the paper utilizes metallographic microscopy, scanning electron microscopy-electron backscatter diffraction technology, and aberration-corrected transmission electron microscopy technology to observe and characterize the interface region between silicon core and matrix in the deposition process of electronic-grade polycrystalline silicon, providing a full-scale characterization of the interface morphology, grain structure, and orientation distribution from macro to micro. Finally, the paper illustrates the current uncertainties regarding polycrystalline silicon.
Large-size electronic-grade polycrystalline silicon is an important material in the semiconductor industry with broad application prospects. However, electronic-grade polycrystalline silicon has extremely high requirements for production technology and currently faces challenges such as carbon impurity breakdown, microstructure and composition nonuniformity and a lack of methods for preparing large-size mirror-like polycrystalline silicon samples. This paper innovatively uses physical methods such as wire cutting, mechanical grinding and ion thinning polishing to prepare large-size polycrystalline silicon samples that are clean, smooth, free from wear and have clear crystal defects. The material was characterized at both macroscopic and microscopic levels using metallographic microscopy, scanning electron microscopy (SEM) with backscattered electron diffraction (EBSD) techniques and scanning transmission electron microscopy (STEM). The crystal structure changes from single crystal silicon core to the surface of the bulk in the large-size polycrystalline silicon samples were revealed, providing a technical basis for optimizing and improving production processes.
The dynamic propagation of a crack in a functionally graded piezoelectric material (FGPM) interface layer between two dissimilar piezoelectric layers under anti-plane shear is analyzed using the integral transform approaches. The properties of the FGPM layers vary continuously along the thickness. FGPM layer and the two homogeneous piezoelectric layers are connected weak-discontinuously. A constant velocity Yoffe-type moving crack is considered. Numerical values on the dynamic energy release rate (DERR) are presented for the FGPM. Followings are helpful to increase of the resistance of the crack propagation of the FGPM interface layer: (a) certain direction and magnitude of the electric loading; (b) increase of the thickness of the FGPM interface layer; (c) increase of the thickness of the homogeneous piezoelectric layer which has larger material properties than those of the crack plane in the FGPM interface layer. The DERR always increases with the increase of crack moving velocity and the gradient of the material properties.
Intraband transitions of an impurity electron from the ground state to 2Px and 2Py excited states of a shallow donor located near a semiconductor-metal interface are investigated as a function of the donor distance from the interface. Impurity states are calculated within the effective mass approximation and using a variational scheme in which the energies and the oscillator strength for the intraband absorption are obtained analytically.
Several methods for handling sloping fluid–solid interfaces with the elastic parabolic equation are tested. A single-scattering approach that is modified for the fluid–solid case is accurate for some problems but breaks down when the contrast across the interface is sufficiently large and when there is a Scholte wave. An approximate condition for conserving energy breaks down when a Scholte wave propagates along a sloping interface but otherwise performs well for a large class of problems involving gradual slopes, a wide range of sediment parameters, and ice cover. An approach based on treating part of the fluid layer as a solid with low shear speed is developed and found to handle Scholte waves and a wide range of sediment parameters accurately, but this approach needs further development. The variable rotated parabolic equation is not effective for problems involving frequent or continuous changes in slope, but it provides a high level of accuracy for most of the test cases, which have regions of constant slope. Approaches based on a coordinate mapping and on using a film of solid material with low shear speed on the rises of the stair steps that approximate a sloping interface are also tested and found to produce accurate results for some cases.
After the parabolic equation method was initially applied to scalar wave propagation problems in ocean acoustics and seismology, it took more than a decade before there was any substantial progress in extending this approach to problems involving solid layers. Some of the key steps in the development of the elastic parabolic equation are discussed here. The first breakthrough came in 1985 with the discovery that changing to an unconventional set of dependent variables makes it possible to factor the operator in the elastic wave equation into a product of outgoing and incoming operators. This innovation, which included an approach for handling fluid-solid interfaces, was utilized in the first successful implementations of the elastic parabolic equation less than five years later. A series of papers during that period addressed the issues of accuracy and stability, which require special attention relative to the scalar case. During the 1990s, the self-starter made it possible to handle all types of waves, rotated rational approximations of the operator square root made it possible to handle relatively thin solid layers, and there was some progress in the accurate treatment of sloping interfaces. During the next decade, an improved formulation and approach for handling interfaces facilitated the treatment of piecewise continuous depth dependence and sloping interfaces. During the last 10 years, the accuracy of the elastic parabolic equation was improved and tested for problems involving sloping interfaces and boundaries, and this approach was applied to Arctic acoustics and other problems involving thin layers. After decades of development, the elastic parabolic equation has become a useful tool for a wide range of problems in seismology, seismo-acoustics, and Arctic acoustics, but possible directions for further work are discussed.