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This paper studies the thermoelastic damping in microbeams considering the couple stress theory with microstructure. This theory includes the microinertia effects, coming from the kinetic energy due to the velocity gradient through the differential macroelements. A Galerkin-based reduced order model and complex frequency approach have been used to determine the quality factor. For a gold microbeam as a case study, the obtained results for different ambient temperatures, beam lengths and thicknesses are compared to those obtained using the classic theory of elasticity. The comparison has been made for different values of the length scale parameter. The effects of the microinertia term on the magnitude of the thermoelastic damping have also been investigated and shown that for which conditions these effects are significant.

In this work, the photothermal interactions in semiconductor microbeams during the photo-thermo-elastic process have been investigated using the generalized photothermal theory. The proposed mathematical model is constructed based on the Euler–Bernoulli model, the heat equation with two-phase lag and coupled plasma wave equation that indicates the prediction of thermal, elastic and photovoltaic effects in the microbeam resonators. Based on the introduced model, the dynamic influence of thermoelastic photovoltaic microbeam resting on an elastic foundation medium with two parameters has been studied. The Winkler foundation parameter is one of these parameters while the second is the shear foundation parameter. In the field of Laplace transform, the governing equations have been solved while the inverse transforms are found numerically using a tried-and-true approximation technique based on Fourier transform series. The numerical calculations of thermophysical field variables have been discussed and graphically presented. The effects of the magnetic field, Winkler and shear foundation parameters, and lifetime of photogenerated electron have been investigated and studied in detail. Comparisons have been made between the proposed model and previous models that have been derived as special cases from the presented results.