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This paper reports experimental study on the hardness and wear behavior of NiTi Thin Film Shape Memory Alloy (SMA) at micrometer scales. A triboindenter (Hysitron Inc., Minneapolis, USA) was used to conduct a series of indentations under various loads (the corresponding maximum indentation depth from 18.52nm to 333.53nm) and wear by scanning scratch method at temperatures from 25°C to 120°C. It was found that with increasing temperature, the hardness of NiTi thin film increased while its wear resistance decreased. The observed anomalous variation of wear resistance with hardness value is further analyzed by the interplay of phase transition and plasticity.