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articleNo Access
TiNi FILM BASED SHAPE MEMORY ALLOY AND MICROACTUATORS
- YONGQING FU,
- HEJUN DU,
- WEIMIN HUANG, and
- MIN HU
International Journal of Computational Engineering Science01 Jun 2003
Preview Abstract
Some critical issues and problems for the development of TiNi thin films and their MEMS applications were discussed in this paper. New types of TiNi thin film based microactuators, such as microgrippers, microvalves, micromirror, etc. were designed and fabricated using MEMS techniques.

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