PLASMA DEPOSITION OF FLUOROPOLYMER FILMS IN DIFFERENT GLOW DISCHARGE REGIMES
The following sections are included:
Introduction
On the Jargon of PE-CVD Processes
Continuous, Afterglow and Modulated PE-CVD
Fluorocarbon Monomers
Diagnostic Techniques for PE-CVD Processes of Fluoropolymers
Surface and Bulk Analysis
Plasma Diagnostic Techniques
Active Species in Fluorocarbon Plasmas
Additives to Drive the F/CFx Density Ratio of a Fluorocarbon Discharge
Relevant Parameters in PE-CVD Processes of Fluoropolymers
Ion Bombardment and Substrate Temperature
Power, Flow Rate, Pressure and Combined Parameters
Distance of the Substrate from the Glow
Duty Cycle and Period in Modulated Plasmas
The Activated Growth Model
Applications of Plasma-Deposited Fluoropolymers
Wettability of Fluorocarbon Coatings and Applications for Textiles and Paper
Biomedical Applications Proposed for Plasma-Deposited Fluoropolymers
Conclusive Remarks
Acknowledgements
References
