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CORPUSCULAR DIAGNOSTICS OF PLASMA POLYMERIZATION PROCESSES
https://doi.org/10.1142/9781860945380_0004Cited by:1 (Source: Crossref)
Abstract:
The following sections are included:
Corpuscular Diagnostics in Plasma Processing
Basic Processes in Particle Interaction
Gas Discharge Phenomena
Plasma Sheath Effects
Surface Interaction
Experimental Equipment for Corpuscular Diagnostics
Common Particle Collection by Film Deposition
Mass Spectrometrical Methods
Energy Filter Techniques
Neutral Species Detection
Neutral Flux Detection and Partial Pressure Analysis
Threshold Ionization Mass Spectrometry
Electron Attachment Mass Spectrometry
Process Ion Detection
RF Plasma Processing
RF Sputter Deposition
Microwave Plasma Processing
Negative Ion Detection
Pulsed Plasma Operation
Plasma Ion Mass Spectra
References
