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PHOTOCHEMICAL AND PHOTOETCHING PROCESSES
https://doi.org/10.1142/9789812775757_0023Cited by:0 (Source: Crossref)
Abstract:
The following sections are included:
Introduction
Etching and CVD Experiments
Experimental Systems
Beamline and Multilayered Mirror Monochromator
Reaction Chamber
Etching and Unique Material-Selectivity
CVD and Unique Material-Selectivity
SR Assisted Epitaxial Growth
SR Irradiation Effects on the Low Temperature Condensed Layer of Dimethyl Aluminum Hydride (DMAH)
In Situ Monitoring Techniques and Reaction Mechanism Study
BML-IRAS
Principle of BML-IRAS
Application of BML-IRAS to Reaction Mechanism Study of SR Assisted GS-MBE
IRAS with SR Irradiation Effects on Chemisorbed Hydrogen/Si(100)
Scanning Tunnelling Microscopy (STM)
Core Electron Excitation in SR Process
Future Prospects: Nanostructure Fabrication by SR Processes
Acknowledgment
References
