ARRANGEMENT OF INORGANIC MATERIALS ON SELF-ASSEMBLED MONOLAYERS USING CHEMICAL REACTIONS

Novel processes for fabricating micro/nano sized oxide devices employing self-assembled monolayers (SAM) were developed. SAM of PTCS (phenyltrichlorosilane) was modified to have a phenyl / hydroxyl-group pattern by UV irradiation using a photomask and was used as a template to arrange inorganic fine particles. Surface modification of micro/nano sized inorganic particles and chemical reactions between those particles and SAM were studied. Two-dimensional arrangement of functional particles on a SAM in a controlled manner through the formation of strong chemical bonds, such as amide or ester bonds, can be applied to the future microelectronics and photonics.