No Access
Chapter 11: Sensor
https://doi.org/10.1142/9789814699020_0011Cited by:0 (Source: Crossref)
Abstract:
The following sections are included:
Introduction
3D Sensor Design
SOI MEMS Accelerometer
CMOS Readout Circuit
Testing and Measurement
Hermetic Test
Bonding Reliability
Measurement Results
Summary
