Wafer-lever Au Nanogap-Nanopore Fabricated by NEMS Technology
Nowadays, nanogap-nanopore devices have attracted widely concerns for its potential application in the third generation DNA sequencing. However, an effective universal method to fabricate nanogap-nanopore device is still needed to overcome the low efficiency problem in fabrication technology. In this paper, wafer-lever Au nanogap-nanopore was fabricated by NEMS technology successfully. Suspended sandwich structure (SiN-Au nanowire-SiO2, 100nm/20nm/200nm thick) was demonstrated, which can isolate Au nanowire and salt solution effectively. Moreover, this thin nano structure made Au nanogap-nanopore milling much easier with the help of focused ion beam (FIB) in a controllable way. Since the whole manufacture process was achieved in wafer-lever, this method made Au nanogap-nanopore in DNA sequencing more convenient.
