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SILICON FINFETS AS DETECTORS OF TERAHERTZ AND SUB-TERAHERTZ RADIATION

    https://doi.org/10.1142/S0129156411006374Cited by:36 (Source: Crossref)

    We report on terahertz detection (from 0.2 THz to 2.4 THz) by Si FinFETs of different widths (with 2, 20, and 200 fins connected in parallel). FinFETs (with a small number of fins and with feature sizes as short as 20 nm to 40 nm) showed a very high responsivity (far above that previously measured for standard CMOS). We explain this improvement by negligible narrow channel effects.

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