DEVELOPMENT OF LONG LIFETIME AND HIGH INTENSITY NANOCLUSTER ION SOURCE BY PLASMA-GAS-AGGREGATION

We have constructed a magnetron nanocluster ion source by plasma-gas-aggregations. Using the magnetron type nanocluster ion source and TOF mass spectrometer, we measured the mass distribution of boron nanoclusters. In these experiments, we detected nanocluster of while the peaks around these masses cannot be resolved. Although magnetron type nanocluster source is useful tool, it has a weak beam intensity and short lifetime for using as an ion source of nanocluster ion implantation, which is one of the important applications for the nanocluster ion source. For this reason, we are constructing and developing a new nanocluster ion source (waveguide-surfatron nanocluster ion source). The new nanocluster ion source consists a large area plasma ion source and gas aggregation cell instead of present nanocluster ion source configuration (magnetron type nanocluster ion source).