Research PapersNo Access

STUDY OF HYSTERESIS BEHAVIOR OF CHARGES IN FLUORINATED POLYIMIDE FILM BY USING CAPACITANCE-VOLTAGE METHOD

YONG K. LEE

Adonbest Technology Inc., West Vancouver BC V7S 1C8, Canada

https://doi.org/10.1142/S0217984906010858Cited by:4 (Source: Crossref)

Abstract

The hysteresis behavior of charges was observed in Capacitance-Voltage (C-V) curve characteristics of fluorinated polyimide film in MPS (Cu-fluorinated polyimide film-Si) test structure. The degree of hysteresis was almost constant up to 150°C and then sharply increased beyond 150°C. Hysteresis behavior up to 150°C was due to a fixed amount of mobile charges at the interface between fluorinated polyimide film and Si and one beyond 150°C was due to abrupt increase of mobile charges and their enhanced movement in the bulk of fluorinated polyimide film due to structural transition of fluorinated polyimide film.

Keywords:

References

S. M. Sze , Physics of Semiconductor Devices ( John Wiley and Sons , New York , 1981 ) . Google Scholar
E. M. Nicollian and J. R. Brews , MOS Physics and Technology ( John Wiley and Sons , New York , 1982 ) . Google Scholar
R. B. Seymour and C. E. Carraher Jr. , Polymer Chemistry ( Marcel Dekker , New York , 1998 ) . Google Scholar
S. L. Rosen , Fundamental Principles of Polymeric Materials ( John Wiley and Sons , New York , 1982 ) . Google Scholar
Y. K. Lee, Doctoral Thesis, RPI, Troy, New York (1996) . Google Scholar