SPECIAL ISSUE ON THE 3RD INTERNATIONAL CONFERENCE ON MATERIALS FOR ADVANCED TECHNOLOGIES, SYMPOSIUM G: NANODEVICES AND NANOFABRICATION; EDITED BY QING ZHANGNo Access

PLASMA-AIDED NANOFABRICATION: "PLASMA-BUILDING BLOCK" APPROACH

KEN OSTRIKOV

School of Physics, The University of Sydney, Sydney, NSW 2006, Australia

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and

SHUYAN XU

Plasma Sources and Applications Center, NIE, Nanyang Technological University, Singapore

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https://doi.org/10.1142/S0219581X06004607Cited by:0 (Source: Crossref)

Abstract

Unique features and benefits of the plasma-aided nanofabrication are considered by using the "plasma-building block" approach, which is based on plasma diagnostics and nanofilm characterization, cross-referenced by numerical simulation of generation and dynamics of building blocks in the gas phase, their interaction with nanostructured surfaces, and ab initio simulation of chemical structure of relevant nanoassemblies. The examples include carbon nanotip microemitter structures, semiconductor quantum dots and nanowires synthesized in the integrated plasma-aided nanofabrication facility.

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References

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PLASMA-AIDED NANOFABRICATION: "PLASMA-BUILDING BLOCK" APPROACH

Abstract

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